论文信息 - Raman study of light-emitting SiNx films grown on Si by low-pressure chemical vapor deposition - 字舞流文

Raman study of light-emitting SiNx films grown on Si by low-pressure chemical vapor deposition

F. Komarov | L. Vlasukova | I. Parkhomenko | A. Mudryi | O. Milchanin | O. Korolik | A. Togambaeva