Integrated Optical Chips in a Michelson Interference Acceleration Seismic Geophone

A kind of hybridintegrated optical acceleration seismic geophone based on Michelson interferometry was presented.On the LiNbO3 substrate with the dimensions of 38 mm×6 mm×2 mm,DoubleY branching guide,phase modulator and polarizers were integrated to constitute the Michelson interference chip.The main design parameters of the geophone system are as following:freerunning frequency is 3 549 Hz;phase detection sensitivity ΔΦ/a is 1.1×10-2 rad/m/s2;work frequency band is 01 065 Hz.