Micromechanics via synchrotron radiation

A significant portion of micromechanics deals with actuators: devices which modify their environment. Manufacturing techniques for this class of devices involve 3-dimensionality, tolerances, IC-compatibility, a broad material base and cost effectiveness. Photoresist based processing with X-ray exposures via synchrotron radiation has many of the required attributes for actuator manufacturing. This is particularly true for exposures with 20 keV X-rays where structural heights to 10 cm have been obtained and where X-ray mask issues simplify. Tests with this type of tool have brought significant advances in linear actuators and have been used to fabricate a micro electro mechanical system, a dynamometer on a chip, for magnetic micromotor testing.