Novel 2-DOF Planar Ultrasonic Motor With Characteristic of Variable Mode Excitation

This paper presents a novel 2-DOF planar linear ultrasonic motor. The stator of the motor can be divided as two transducers and two isosceles triangular beams. The bending vibration modes and longitudinal vibration modes of the stator are superposed as three operation modes and generate elliptical trajectories of the driving foot in two planes to provide the thrust force along two dimensions. The operating principle of the motor and the formation of the elliptical trajectory of the driving foot are analyzed, and the variable mode excitation method is illustrated. A prototype was made and experiment investigation of the motor characteristics is presented. Testing results of the prototype shows that this motor can gain a maximum speed of 211.3 mm/s and its thrust force can reach 3.15 N under an exciting voltage of 400 VP-P. The major feature of the motor is that the 2-DOF driving function can be achieved by using the method of variable mode excitation.

[1]  Won Hee Lee,et al.  Butterfly-shaped ultra slim piezoelectric ultrasonic linear motor , 2011 .

[2]  S. Shi,et al.  Development of a 2-DOF planar ultrasonic motor using longitudinal-bending hybrid transducer , 2009, 2009 18th IEEE International Symposium on the Applications of Ferroelectrics.

[3]  F. Luo,et al.  Experimental investigation on sandwich structure ring-type ultrasonic motor. , 2015, Ultrasonics.

[4]  Rong-Fong Fung,et al.  System identification of a novel 6-DOF precision positioning table , 2009 .

[6]  Sun-Kyu Lee,et al.  Ultraprecision XY stage using a hybrid bolt-clamped Langevin-type ultrasonic linear motor for continuous motion. , 2015, The Review of scientific instruments.

[7]  Bo Liu,et al.  Optimum Efficiency Control of Traveling-Wave Ultrasonic Motor System , 2011, IEEE Trans. Ind. Electron..

[8]  Chunsheng Zhao,et al.  A New Type Butterfly-Shaped Transducer Linear Ultrasonic Motor: , 2011 .

[9]  Ser Tong Quek,et al.  A novel ring type ultrasonic motor with multiple wavenumbers: design, fabrication and characterization , 2009 .

[10]  Minoru Kurosawa,et al.  High speed, high resolution ultrasonic linear motor using V-shape two bolt-clamped Langevin-type transducers , 2009 .

[11]  Liang Yan,et al.  A novel two degree-of-freedom ultrasonic planar motor driven by single stator , 2012, IEEE 10th International Conference on Industrial Informatics.

[12]  H. Van Brussel,et al.  4B-3 A Multi-DOF Positioning Stage based on Novel Piezoelectric Resonant Drive Modules , 2006, 2006 IEEE Ultrasonics Symposium.

[13]  Xiaohui Yang,et al.  A Novel Rotary Piezoelectric Motor Using First Bending Hybrid Transducers , 2015 .

[14]  Chunsheng Zhao,et al.  A new standing-wave-type linear ultrasonic motor based on in-plane modes. , 2011, Ultrasonics.

[15]  S. Dong,et al.  High-order face-shear modes of relaxor-PbTiO3 crystals for piezoelectric motor applications , 2014 .

[16]  Shuxiang Dong,et al.  A square-plate piezoelectric linear motor operating in two orthogonal and isomorphic face-diagonal-bending modes , 2014, IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control.

[17]  Chunsheng Zhao,et al.  Linear ultrasonic motor with wheel-shaped stator , 2010 .

[18]  Takashi Maeno,et al.  Control of multi-dof ultrasonic actuator for dexterous surgical instrument , 2008 .

[19]  Paolo Gallina,et al.  Design and testing of a 5-degrees-of-freedom, large working range micropositioning stage , 2012, Robotics Auton. Syst..

[20]  Genadijus Kulvietis,et al.  The actuator for micro moving of a body in a plane , 2005 .

[21]  Chunsheng Zhao,et al.  A small linear ultrasonic motor utilizing longitudinal and bending modes of a piezoelectric tube , 2014, IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control.

[22]  Lin Yang,et al.  A novel dual stator-ring rotary ultrasonic motor , 2013 .