Phase only SLM as a reference element in Twyman-Green laser interferometer for MEMS measurement

The active Twyman-Green laser interferometer for MEMS measurement equipped with Spatial Light Modulator (SLM) as a reference element is reported. The SLM is electrically addressed, reflective (made in Liquid Crystal on Silicone technology) and phase-only device which allows to actively shape of the reference beam wavefront in the interferometer. The proper use of the SLM in interferometric MEMS measurement is possible after opto-mechanical modification of the interferometer, performed calibration procedures and special interferogram processing. All these aspects are described. The use of such device benefits extension of measurement range and simplification testing procedures. Usefulness of the SLM is shown at the examples of active microelements testing. Advantages and disadvantages of SLM application are described and potential of this device for interferometry is discussed.

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