Some recent advances in multi-material micro- and nano-manufacturing

The increasing demand for micro-products and components can be met only partly by the lithography-based micro-electromechanical systems fabrication processes that originated from the silicon-based microelectronics revolution of the late twentieth century. In particular, such processes have limitations when applied to new micro-devices which require the use of a variety of materials and complex 3D microstructures with high aspect ratios. In this context, the paper presents technologies complementary to lithography-based processes for the manufacture of devices or components incorporating micro- and nano-scale features. More specifically, special attention is given to the main findings obtained over the last 5 years from the authors’ research programme on a range of micro- and nano-manufacturing technologies, namely, micro-electrodischarge machining, laser ablation, micro-milling, focussed-ion beam machining, micro-injection moulding, nano-imprint lithography, hot embossing and electroforming.

[1]  Michael Sylvester Packianather,et al.  Micro-injection moulding: Factors affecting the achievable aspect ratios , 2007 .

[2]  Duc Truong Pham,et al.  Tool-path generation system for micro-electro discharge machining milling , 2003 .

[3]  Stefan Simeonov Dimov,et al.  Development and validation of functional imprint material for the step and flash imprint lithography process , 2008 .

[4]  Michael Sylvester Packianather,et al.  The finite element analysis of melt flow behaviour in micro-injection moulding , 2008 .

[5]  D. Pham,et al.  Laser milling of ceramic components , 2007 .

[6]  Duc Truong Pham,et al.  An investigation of tube and rod electrode wear in micro EDM drilling , 2007 .

[7]  Atanas Ivanov,et al.  Micromilling strategies for machining thin features , 2006 .

[8]  Takahisa Masuzawa,et al.  State of the Art of Micromachining , 2000 .

[9]  D. Pham,et al.  A study of fused silica micro/nano patterning by focused-ion-beam , 2007 .

[10]  Ming-Chuan Leu,et al.  Electroforming Process and Application to Micro/Macro Manufacturing , 2001 .

[11]  P. T. Tang,et al.  Comparison between microfabrication technologies for metal tooling , 2006 .

[12]  Marc Madou,et al.  Experimental investigation and numerical simulation of injection molding with micro-features , 2002 .

[13]  Stefan Simeonov Dimov,et al.  Micro-electrode discharge machining: Factors affecting the quality of electrodes produced on the machine through the process of wire electro-discharge machining , 2007 .

[14]  Stefan Simeonov Dimov,et al.  Laser milling: Modelling crater and surface formation , 2006 .

[15]  T. Jaaskelainen,et al.  Replication of sub‐micron features using amorphous thermoplastics , 2002 .

[16]  张哉根,et al.  Leu-M , 1991 .

[17]  M. Madou.  Fundamentals of microfabrication , 1997 .

[18]  Duc Truong Pham,et al.  Micromilling strategies: Optimization issues , 2004 .

[19]  Wire electro discharge grinding: surface finish optimisation , 2008 .

[20]  J. Kettle,et al.  Patterning of nanomembranes with a focused-ion-beam , 2008, 2008 26th International Conference on Microelectronics.

[21]  Stefan Simeonov Dimov,et al.  Fabrication of complex 3D structures using Step and Flash Imprint Lithography (S-FIL) , 2008 .

[22]  Marc Madou,et al.  Fundamentals of Microfabrication , 2002 .

[23]  Takahisa Masuzawa,et al.  Wire Electro-Discharge Grinding for Micro-Machining , 1985 .

[24]  D. Pham,et al.  Laser milling as a ‘rapid’ micromanufacturing process , 2004 .

[25]  S. Dimov,et al.  Data preparation for focused ion beam machining of complex three-dimensional structures , 2008 .

[26]  Duc Truong Pham,et al.  A study of micro-electro discharge machining electrode wear , 2007 .

[27]  Stefan Simeonov Dimov,et al.  Patterning of amorphous and polycrystalline Ni78B14Si8 with a focused-ion-beam , 2007 .

[28]  L. J. Guo,et al.  Nanoimprint Lithography: Methods and Material Requirements , 2007 .

[29]  Duc Truong Pham,et al.  Micro-EDM—recent developments and research issues , 2004 .

[30]  Stefan Simeonov Dimov,et al.  A roadmapping study in Multi-Material Micro Manufacture , 2006 .

[31]  S. Dimov,et al.  The effects of tool surface quality in micro-injection moulding , 2007 .

[32]  Stefan Simeonov Dimov,et al.  Microinjection moulding: The influence of runner systems on flow behaviour and melt fill of multiple microcavities , 2008 .

[33]  Duc Truong Pham,et al.  Techniques for improving surface quality after laser milling , 2008 .

[34]  Kamlakar P Rajurkar,et al.  Micro and Nano Machining by Electro-Physical and Chemical Processes , 2006 .

[35]  Duc Truong Pham,et al.  New Methods for Tool Failure Detection in Micromilling , 2006 .

[36]  M. Heckele,et al.  Review on micro molding of thermoplastic polymers , 2004 .

[37]  Ekkard Brinksmeier,et al.  Machining of Precision Parts and Microstructures , 2002 .

[38]  S. Dimov,et al.  Investigation of micro-injection moulding: Factors affecting the replication quality , 2007 .

[39]  M. Madou.  Fundamentals of microfabrication : the science of miniaturization , 2002 .

[40]  Duc Truong Pham,et al.  Laser milling: Pulse duration effects on surface integrity , 2008 .

[41]  Duc Truong Pham,et al.  New Technology for setting up The Working Coordinate system in micromilling , 2007 .

[42]  Andrzej Rosochowski,et al.  Micromilling: Material microstructure effects , 2006 .