RF MEMS Circuit Design for Wireless Communications

Preface. Wireless Systems. Elements of RF Circuit Design. RF MEMS-Enabled Circuit Elements and Models. Novel RF MEMS-Enabled Circuits. RF MEMS-Based Circuit Design. Appendixes. Author Biography. Index.

[1]  S.S. Wong,et al.  A study on substrate effects of silicon-based RF passive components , 1999, 1999 IEEE MTT-S International Microwave Symposium Digest (Cat. No.99CH36282).

[2]  M. Caulton,et al.  Hybrid integrated lumped-element microwave amplifiers , 1968 .

[3]  De Los Santos,et al.  MEMS for RF/Wireless Applications , 2003 .

[4]  G. Gonzalez Microwave Transistor Amplifiers: Analysis and Design , 1984 .

[5]  H. Greenhouse,et al.  Design of Planar Rectangular Microelectronic Inductors , 1974 .

[6]  E. Yeatman,et al.  MEMS high Q microwave inductors using solder surface tension self-assembly , 2001, 2001 IEEE MTT-S International Microwave Sympsoium Digest (Cat. No.01CH37157).

[7]  M. Pardoen,et al.  Reducing the substrate losses of RF integrated inductors , 1998 .

[8]  C. D. Rios,et al.  RF MEMS from a device perspective , 2000 .

[9]  C. Nguyen,et al.  High-Q HF microelectromechanical filters , 2000, IEEE Journal of Solid-State Circuits.

[10]  Frederick H. Raab,et al.  Solid State Radio Engineering , 1980 .

[11]  Vitali Chtchekatourov,et al.  Modeling of MEMS capacitive switches by TLM , 2000, 2000 IEEE MTT-S International Microwave Symposium Digest (Cat. No.00CH37017).

[12]  Chen-Yu Chi,et al.  Planar microwave and millimeter-wave components using micromachining technologies. , 1995 .

[13]  C. P. Hartwig,et al.  Losses in Microstrip , 1968 .

[14]  H. Nathanson,et al.  The resonant gate transistor , 1967 .

[15]  C. Nguyen,et al.  A high-Q tunable micromechanical capacitor with movable dielectric for RF applications , 2000, International Electron Devices Meeting 2000. Technical Digest. IEDM (Cat. No.00CH37138).

[16]  K. K. Clarke,et al.  Communication Circuits: Analysis and Design , 1971 .

[17]  Ki-Woong Chung,et al.  Fully integrated micromachined capacitive switches for RF applications , 2000, 2000 IEEE MTT-S International Microwave Symposium Digest (Cat. No.00CH37017).

[18]  Elliott R. Brown,et al.  RF-MEMS switches for reconfigurable integrated circuits , 1998 .

[19]  Kwyro Lee,et al.  High-performance electroplated solenoid-type integrated inductor (SI/sup 2/) for RF applications using simple 3D surface micromachining technology , 1998, International Electron Devices Meeting 1998. Technical Digest (Cat. No.98CH36217).

[20]  J. Larson,et al.  Ultra-miniature high-Q filters and duplexers using FBAR technology , 2001, 2001 IEEE International Solid-State Circuits Conference. Digest of Technical Papers. ISSCC (Cat. No.01CH37177).

[21]  J.A. Higgins,et al.  MEM relay for reconfigurable RF circuits , 2001, IEEE Microwave and Wireless Components Letters.

[22]  G. M. Rebeiz,et al.  A Ka-band micromachined low-phase-noise oscillator , 1999 .

[23]  R. Johnson Mechanical filters in electronics , 1983 .

[24]  Hongrui Jiang,et al.  Fabrication of high-performance on-chip suspended spiral inductors by micromachining and electroless copper plating , 2000, 2000 IEEE MTT-S International Microwave Symposium Digest (Cat. No.00CH37017).

[25]  Anatol I. Zverev,et al.  Handbook of Filter Synthesis , 1967 .

[26]  I. Cernica,et al.  Dielectric and semiconductor membranes as support for microwave circuits , 1997, 1997 International Semiconductor Conference 20th Edition. CAS '97 Proceedings.

[27]  W. Alan Davis Microwave semiconductor circuit design , 1984 .

[28]  K. Gupta,et al.  Digitally controllable variable high-Q MEMS capacitor for RF applications , 2001, 2001 IEEE MTT-S International Microwave Sympsoium Digest (Cat. No.01CH37157).

[29]  E. Yoon,et al.  Surface micromachined solenoid on-Si and on-glass inductors for RF applications , 1999 .

[30]  Asad A. Abidi,et al.  Design methodology used in a single-chip CMOS 900 MHz spread-spectrum wireless transceiver , 1998, Proceedings 1998 Design and Automation Conference. 35th DAC. (Cat. No.98CH36175).

[31]  Joel F. Rosenbaum,et al.  Bulk Acoustic Wave Theory and Devices , 1988 .

[32]  J.R. Clark,et al.  High-Q VHF micromechanical contour-mode disk resonators , 2000, International Electron Devices Meeting 2000. Technical Digest. IEDM (Cat. No.00CH37138).

[33]  E. Abou-Allam,et al.  Low-voltage 1.9-GHz front-end receiver in 0.5-μm CMOS technology , 2001, IEEE J. Solid State Circuits.

[34]  G. R. Kline,et al.  Development of miniature filters for wireless applications , 1995, Proceedings of 1995 IEEE MTT-S International Microwave Symposium.

[35]  R. Castello,et al.  A 2-dB noise figure 900-MHz differential CMOS LNA , 2001 .

[36]  Joy Laskar,et al.  Embedded Solenoid Inductors for RF CMOS Power Amplifiers , 2001 .

[37]  K. Hashimoto Surface Acoustic Wave Devices in Telecommunications , 2000 .

[38]  Kun Wang,et al.  VHF free-free beam high-Q micromechanical resonators , 2000 .

[39]  Wes Hayward Introduction to Radio Frequency Design , 1982 .

[40]  L. Vietzorreck Modeling of the millimeter-wave behavior of MEMS capacitive switches , 1999, 1999 IEEE MTT-S International Microwave Symposium Digest (Cat. No.99CH36282).

[41]  Y. Imai,et al.  Design and performance of low-current GaAs MMICs for L-band front-end applications , 1991 .

[42]  Gabriel M. Rebeiz,et al.  RF MEMS switches and switch circuits , 2001 .

[43]  C. Nguyen,et al.  Design of low actuation voltage RF MEMS switch , 2000, 2000 IEEE MTT-S International Microwave Symposium Digest (Cat. No.00CH37017).

[44]  H. D. L. Santos Introduction to Microelectromechanical(MEM)Microwave Systems , 1999 .

[45]  S. Koul,et al.  Stripline-Like Transmission Lines for Microwave Integrated Circuits , 1989 .

[46]  Ali M. Niknejad,et al.  Analysis and optimization of monolithic inductors and transformers for RF ICs , 1997, Proceedings of CICC 97 - Custom Integrated Circuits Conference.

[47]  Songcheol Hong,et al.  A low voltage actuated micromachined microwave switch using torsion springs and leverage , 2000, 2000 IEEE MTT-S International Microwave Symposium Digest (Cat. No.00CH37017).

[48]  E. M. Jones,et al.  Microwave Filters, Impedance-Matching Networks, and Coupling Structures , 1980 .

[49]  A. Dec,et al.  Micromachined electro-mechanically tunable capacitors and their applications to RF IC's , 1998 .

[50]  J. Rodriguez,et al.  Problem (2) , 1994 .

[51]  S. D. Senturia,et al.  CAD challenges for microsensors, microactuators, and microsystems , 1998, Proc. IEEE.

[52]  Gabriel M. Rebeiz,et al.  30 GHz tuned MEMS switches , 1999, 1999 IEEE MTT-S International Microwave Symposium Digest (Cat. No.99CH36282).

[53]  A. Abidi,et al.  Large suspended inductors on silicon and their use in a 2- mu m CMOS RF amplifier , 1993, IEEE Electron Device Letters.

[54]  Michiel Steyaert,et al.  A 1.8-GHz low-phase-noise CMOS VCO using optimized hollow spiral inductors , 1997, IEEE J. Solid State Circuits.

[55]  S. Horwitz,et al.  Application of film bulk acoustic resonators , 1992, 1992 IEEE Microwave Symposium Digest MTT-S.

[56]  Jun-Bo Yoon,et al.  Surface micromachined solenoid on-Si and on-glass inductors for RF applications , 1999, IEEE Electron Device Letters.

[57]  S. Senturia,et al.  Self-consistent simulation and modelling of electrostatically deformed diaphragms , 1994, Proceedings IEEE Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines and Robotic Systems.

[58]  R. Baets,et al.  Suspended membrane inductors and capacitors for application in silicon MMIC's , 1996, IEEE 1996 Microwave and Millimeter-Wave Monolithic Circuits Symposium. Digest of Papers.

[59]  G. Eleftheriades,et al.  High-Q bulk micromachined silicon cavity resonator at Ka-band , 2001 .

[60]  C. Kittel Introduction to solid state physics , 1954 .

[61]  J. Papapolymerou,et al.  A micromachined high-Q X-band resonator , 1997 .

[62]  Ark-Chew Wong,et al.  VHF free-free beam high-Q micromechanical resonators , 2000, Journal of Microelectromechanical Systems.