Comparison Of Interferometric Contouring Techniques

Projected fringe contouring, projection moire, shadow moire, and two-angle holographic contouring all measure surface height relative to a reference surface. A single theory can be used to describe all of these techniques. This paper compares these techniques with each other and with conventional interferometry. Quantitative data are obtained from projected fringe contouring and two-angle holographic contouring using phase-measurement interferometry techniques with a surface height measurement repeatability of 1/50 of the contour interval rms.

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