论文信息 - A study on controllable aluminium doped zinc oxide patterning by chemical etching for MEMS application - 字舞流文

A study on controllable aluminium doped zinc oxide patterning by chemical etching for MEMS application

Aliza Aini Md Ralib | A. Crunteanu | P. Blondy | J. Orlianges | M. Chatras | R. Othman | Sheroz Khan | N. Malik | Anis Nurashikin Nordin | A. Z. Alam | Ossama Mortada