The fractal character of micromirror for metal MEMS optical switch

In this paper, the topographies of various micro-mirror surfaces are measured by Scanning Tunneling Microscope (STM) based on the NiCrAu MEMS optical switch unit which is desined and fabricated by ourselves. Fractal theory and Weierstrass-Mandelbrot function is applied to analyze and simulate the topography of different surfaces. The result shows that the surface of MEMS micromirror which fabricated by metal sputter has low anisotropism and the W-M function is very efficient in creating models and is very useful in analysis the topography of MEMS surface.

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