论文信息 - Low power CO2 NDIR sensing using a micro-bolometer detector and a micro-hotplate IR-source

Low power CO2 NDIR sensing using a micro-bolometer detector and a micro-hotplate IR-source

Abstract This paper reports the fabrication and the characterisation of a NDIR sensor based on a micro-bolometer detector and a MEMS IR-source. The accuracy and repeatability of the sensor was studied for CO 2 and hydrocarbons detection. The results show that the performances obtained are totally compatible with indoor air quality requirements. Moreover the sensor has a very low power consumption (in the order of 1 mJ per measurement), which makes it suitable for autonomous applications. Finally, we emphasise the fact that this sensor, because it uses a bolometer array, can be converted in a multi-gas sensor.

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