Optical estimation of statistics of surface roughness from light scattering measurements

The relations between surface statistics and the near- and far-field scattered light statistics are surveyed, mainly using scalar diffraction theory. The methods which have been proposed and used are grouped and described according to whether they operate in the near-field or the far-field and whether they use monochromatic or polychromatic light. Several methods emerge as promising for practical application to non-contacting and non-destructive testing.Deterministic methods such as interference microscopy are not discussed.

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