论文信息 - Effect of Bridging Groups of Precursors on Modulus Improvement in Plasma-Enhanced Copolymerized Low-k Films - 字舞流文

Effect of Bridging Groups of Precursors on Modulus Improvement in Plasma-Enhanced Copolymerized Low-k Films

T. Kikkawa | Y. Hayashi | J. Kawahara | K. Kinoshita | M. Komatsu | A. Nakano | Y. Seino | N. Kunimi | R. Ichikawa | Y. Takasu