State-of-the-Art and Key Technologies in Piezoelectric Linear Actuator of Walker Inchworm

Piezoelectric inchworm actuators can achieve the ability of large displacement,high precision,large output force,fast response and no magnetic influence,so widely used in ultra-precision positioning area.Piezoelectric linear actuators of walker inchworm have the advantage of simple structure,high stiffness,good dynamic performance in clamping mechanism,and small deflection,compact structure,good motion stability in middle drive mechanism.The essence,composition and motion principle of piezoelectric linear actuators of walker inchworm were presented firstly.Then State-of-the-Art and key technologies of inchworm actuators were analyzed.Finally,the development trends of inchworm actuators were discussed.