Analysis of sigma-delta converters for MEMS sensors using power supply voltage as reference

The paper considers the readout and analogue-to-digital conversion circuitry of the output signals coming from sensors, especially MEMS sensors. The study focuses on the effects that take place when the supply voltage is used as reference voltage for the system instead of the usual reference voltage produced by a band-gap circuit (sigma-delta modulator ratiometric with respect to the power supply). This replacement allows us to save the power dissipated by the band-gap circuit and by the reference buffers, thus optimising the power consumption of the system. The presented results show which are the effects on the converter resolution when its reference voltage is not stabilised.

[1]  C. Hierold,et al.  Implantable low power integrated pressure sensor system for minimal invasive telemetric patient monitoring , 1998, Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176.

[2]  Gabor C. Temes,et al.  A two-chip interface for a MEMS accelerometer , 2002, IEEE Trans. Instrum. Meas..

[3]  T. Masuda,et al.  An interface circuit for high-accuracy signal processing of differential-capacitance transducers , 1996, Quality Measurement: The Indispensable Bridge between Theory and Reality (No Measurements? No Science! Joint Conference - 1996: IEEE Instrumentation and Measurement Technology Conference and IMEKO Tec.

[4]  Gabor C. Temes,et al.  Understanding Delta-Sigma Data Converters , 2004 .

[5]  Chuan Yi Tang,et al.  A 2.|E|-Bit Distributed Algorithm for the Directed Euler Trail Problem , 1993, Inf. Process. Lett..

[6]  M. Blagojevic,et al.  SOI Hall sensor based solid state meter for power and energy measurements , 2004, Proceedings of IEEE Sensors, 2004..

[7]  Shoji Kawahito,et al.  Digital interface circuits using sigma-delta modulation for integrated micro-fluxgate magnetic sensors , 1996, 1996 IEEE International Symposium on Circuits and Systems. Circuits and Systems Connecting the World. ISCAS 96.

[8]  K. Damodaran,et al.  A high resolution, integrated data acquisition system for aerospace applications , 2004, The 23rd Digital Avionics Systems Conference (IEEE Cat. No.04CH37576).

[9]  Hiroki Matsumoto,et al.  A high-accuracy digital readout technique for humidity sensor , 2001, IEEE Trans. Instrum. Meas..

[10]  Andrea Baschirotto,et al.  Interface for MEMS-based rotational accelerometer for HDD applications with 2.5rad/sec2 resolution and digital output , 2003 .

[11]  Johan H. Huijsing,et al.  Micropower CMOS temperature sensor with digital output , 1996, IEEE J. Solid State Circuits.

[12]  Franco Maloberti,et al.  Combined air humidity and flow CMOS microsensor with on-chip 15 bit sigma-delta A/D interface , 1995, Digest of Technical Papers., Symposium on VLSI Circuits..

[13]  Ernesto Lasalandra,et al.  A /spl plusmn/1-g dual-axis linear accelerometer in a standard 0.5-/spl mu/m CMOS technology for high-sensitivity applications , 2003 .

[14]  Kofi A. A. Makinwa,et al.  A wind-sensor with integrated interface electronics , 2001, ISCAS 2001. The 2001 IEEE International Symposium on Circuits and Systems (Cat. No.01CH37196).

[15]  A. Gola,et al.  2.5 rad/sec/sup 2/ resolution digital output MEMS-based rotational accelerometer for HDD applications , 2002, Digest of the Asia-Pacific Magnetic Recording Conference.

[16]  Michael Kraft Higher order sigma-delta modulator interfaces for capacitive sensors , 2005 .

[17]  Yevgeny Perelman,et al.  A low-light-level sensor for medical diagnostic applications , 2001, IEEE J. Solid State Circuits.

[18]  Ángel Rodríguez-Vázquez,et al.  A SIMULINK-based approach for fast and precise simulation of switched-capacitor, switched-current and continuous-time /spl Sigma//spl Delta/ modulators , 2003, Proceedings of the 2003 International Symposium on Circuits and Systems, 2003. ISCAS '03..