A programmable electrochemical biosensor array in 0.18 /spl mu/m standard CMOS

A 10/spl times/5 electrochemical biosensor array is designed and fabricated in standard 0.18 /spl mu/m CMOS. Each pixel occupies 160/spl times/120 /spl mu/m/sup 2/ and contains a programmable sensor capable of performing differential impedance spectroscopy, amperometric analysis, and field-effect sensing for molecular biology applications.