论文信息 - Time-resolved diagnosis of processes in PLD of ceramics

Time-resolved diagnosis of processes in PLD of ceramics

The material transfer of ceramics (Al 2 O 3 , ZrO 2 ) in pulsed laser deposition (PLD) is studied as a function of pulsed CO 2 laser radiation parameters and processing variables. Time-resolved measurements of the composition and the electron-temperature as well as the geometry and dynamics of the vapour/plasma were obtained by emission spectroscopy and high-speed photography. The vapour/plasma states are related to the structures of ceramic films grown on metallic substrates

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