PZT thick films on LTCC substrates with an interposed alumina barrier layer

Abstract PZT thick films (PbZr 0.53 Ti 0.47 O 3 with the addition of 6% PbO and 2% Pb 5 Ge 3 O 11 ) with a low sintering temperature were printed and fired on LTCC substrates (951, Du Pont), covered with an alumina barrier layer. The electrical characteristics (remanent polarisation, coercive field, dielectric constant and dielectric loss) of these PZT thick films, together with sets prepared on “unprotected” LTCC substrates and on alumina substrates were compared. Whereas the electrical characteristics of the films on LTCC substrates deteriorated significantly due to interactions between the LTCC substrates and the PZT layers the values obtained for the LTCC/alumina barrier structures were comparable with those on ceramic alumina substrates.

[1]  Masayuki Yamane,et al.  Preparation of Pb(Zr0.53Ti0.47)O3 Thick Films by an Interfacial Polymerization Method on Silicon Substrates and Their Electric and Piezoelectric Properties , 2000 .

[2]  R. Dorey,et al.  Electrical properties of high density PZT and PMN–PT/PZT thick films produced using ComFi technology , 2004 .

[3]  Torsten Thelemann,et al.  Using LTCC for microsystems , 2002 .

[4]  M. Kosec,et al.  Preparation and electromechanical properties of PZT/PGO thick films on alumina substrate , 2001 .

[5]  J. Hoekstra,et al.  State-of-the-art in Europe? , 2004 .

[6]  Jau-Ho Jean,et al.  Camber development during cofiring Ag-based low-dielectric-constant ceramic package , 1997 .

[7]  Y. Akiyama,et al.  Development of Lead Zirconate Titanate Family Thick Films on Various Substrates , 1999 .

[8]  C. Cheon,et al.  Low temperature firing of PZT thick films prepared by screen printing method , 2002 .

[9]  R. Dorey,et al.  Effect of sintering aid and repeated sol infiltrations on the dielectric and piezoelectric properties of a PZT composite thick film , 2002 .

[10]  Seppo Leppävuori,et al.  PLZT thick films for pyroelectric sensors , 1997 .

[11]  J. Rödel,et al.  Bi-layered PZT films by combining thick and thin film technology , 2004 .

[12]  Jonathan J. Bernstein,et al.  Dielectric, ferroelectric, and piezoelectric properties of lead zirconate titanate thick films on silicon substrates , 1995 .

[13]  Qi Zhang,et al.  PZT ‘composite’ ferroelectric thick films , 2002 .

[14]  M. Hrovat,et al.  Characterization of PZT thick films fired on LTCC substrates , 2003 .