论文信息 - A study on the performance of bending mode piezoelectric accelerometers

A study on the performance of bending mode piezoelectric accelerometers

The method of eigenfunction expansion is proposed for obtaining an analytical expression for the frequency response of a bending mode piezoelectric accelerometer system. A set of approximate formulae derived relating the sensitivity with system parameters such as length, width, thickness and the seismic to beam mass ratio. Furthermore, the proposed model was experimentally validated using a laser vibrometer system configured for linear displacement measurements.

J. N. Avaritsiotis | A. T. Kollias | J. Avaritsiotis | A. Kollias

[1] Roger de Reus,et al. Fabrication and characterization of a piezoelectric accelerometer , 1999 .

[2] Farrokh Ayazi,et al. Micromachined inertial sensors , 1998, Proc. IEEE.

[3] A. Nayfeh,et al. Linear and Nonlinear Structural Mechanics , 2002 .

[4] Paul Muralt,et al. Design of novel thin-film piezoelectric accelerometer , 1996 .

[5] Yu Wang,et al. Design, fabrication, and measurement of high-sensitivity piezoelectric microelectromechanical systems accelerometers , 2003 .

[6] B. Auld,et al. Acoustic fields and waves in solids , 1973 .

[7] Patrick Richard Scheeper,et al. A piezoelectric triaxial accelerometer , 1996 .

[8] J. N. Avaritsiotis,et al. Time domain simulation and measurements for piezoelectric bimorphs , 2004 .

[9] Albert P. Pisano,et al. Surface micromachined piezoelectric accelerometers (PiXLs) , 2001 .

[10] J. N. Reddy,et al. Theory and analysis of elastic plates , 1999 .

[11] Jn Ross,et al. Design and fabrication of a micromachined silicon accelerometer with thick-film printed PZT sensors , 2000 .