论文信息 - The influence of the annealing conditions on the photoluminescence of ion-implanted SiO2:Si nanosystem at additional phosphorus implantation - 字舞流文

The influence of the annealing conditions on the photoluminescence of ion-implanted SiO2:Si nanosystem at additional phosphorus implantation

D. M. Gaponova | S. Trushin | D. Tetelbaum | A. Mikhaylov | G. Kachurin | S. G. Yanovskaya | V. K. Vasil’ev