Micro-wave on-wafer testing method based on unknown material substrate

The invention relates to an on-wafer testing method for a micro-wave element based on an unknown material substrate. The method comprises the following steps: firstly, a TRL calibration part, an open circuit resonator and an element to be measured which are suitable for micro-wave on-wafer testing are prepared on a substrate; secondly, a micro-wave on-wafer testing system is calibrated by using a TRL calibration method; thirdly, resonation point of the open circuit resonator is tested by the calibrated micro-wave on-wafer testing system; fourthly, effective dielectric constant and transmission line impedance of the substrate are calculated according to a measured resonation point; fifthly, an S parameter of the element to be measured is measured, and reference impedance of the S parameter is the impedance obtained in the last step; and finally, a reference S parameter with 50 omega impedance is acquired by adopting a method of S parameter impedance conversion. The method has the advantages that the system impedance of the TRL calibration part can be calculated through testing the open circuit resonator; the method combined with standard TRL calibration not only can carry out on-wafer testing on the micro-wave element under the condition that the characteristic of a material is unknown, but also can be combined with a method of field analysis to calculate the real characteristic of the material.