Ultra-precision turning of aspheric mirrors using error-decreasing amendment method

Error filtering and separating methods are the key technology in ultra-precision machining.Using error-decreasing method to amend the processing path,improving the Gaussian weight function to get better filtering effect,and designing a complete system to realize the machining process,all of which increase the form accuracy of aspheric mirror to a large extent.A large number of various non-spherical surfaces machined prove that the value of PV can be improved to be less than 200 nm.