A High-$Q$ Widely Tunable Gigahertz Electromagnetic Cavity Resonator

This paper describes the design, fabrication and testing of a quasi-static electromagnetic cavity resonator fabricated using potassium-hydroxide (KOH) etching, shallow reactive-ion etching (RIE), metalization and wafer bonding. The resonator is distinguished by its simultaneous high-Q near 200, and wide high-frequency tuning range, 2.5-4.0 GHz for the experimental resonator presented here. When combined with an integrated actuator, it should be suitable for use in electronically tunable radio-frequency (RF) bandpass filters and oscillators. The experimental resonator, however, is tuned with an external piezoelectric actuator for simplicity

[1]  V. Lubecke,et al.  Integrated RF MEMS for Single Chip Radio , 2001 .

[2]  Gabriel M. Rebeiz,et al.  Micromachined W-band filters , 1996 .

[3]  Stephen Ming-Chang Hou.  A piezo-tunable gigahertz cavity microelectromechanical resonator , 2004 .

[4]  R. Howe,et al.  Microelectromechanical filters for signal processing , 1992, [1992] Proceedings IEEE Micro Electro Mechanical Systems.

[5]  D T Swift-Hook.  Energy Methods in Electromagnetism , 1981 .

[6]  J. DeNatale,et al.  A high Q, large tuning range, tunable capacitor for RF applications , 2002, Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266).

[7]  F. Ayazi,et al.  Voltage-tunable piezoelectrically-transduced single-crystal silicon resonators on SOI substrate , 2003, The Sixteenth Annual International Conference on Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE.

[8]  H. Shimizu,et al.  ZnO/SiO2-diaphragm composite resonator on a silicon wafer , 1981 .

[9]  Ark-Chew Wong,et al.  VHF free-free beam high-Q micromechanical resonators , 2000, Journal of Microelectromechanical Systems.

[10]  J. Burdick,et al.  Design of Compensation Structures for Anisotropic Etching , 1999 .

[11]  Euisik Yoon,et al.  3-D lithography and metal surface micromachining for RF and microwave MEMS , 2002, Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266).

[12]  T. Weller,et al.  A micromachined tunable CPW resonator , 2001, 2001 IEEE MTT-S International Microwave Sympsoium Digest (Cat. No.01CH37157).

[13]  E. Yeatman,et al.  High Q Achieved in Microwave Inductors Fabricated by Parallel Self-Assembly , 2001 .

[14]  Kun Wang,et al.  High-order medium frequency micromechanical electronic filters , 1999 .

[15]  J. Papapolymerou,et al.  A micromachined high-Q X-band resonator , 1997 .

[16]  C. Nguyen,et al.  Self-aligned 1.14-GHz vibrating radial-mode disk resonators , 2003, TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664).