A novel rotary dual-stage actuator positioner

This paper presents the design and control of a rotary dual-stage actuator (DSA) system, which consists of a voice coil motor (VCM) and a piezoelectric (PZT) microactuator. The performance of the mechanical design is analyzed using a finite element method (FEM) software, whose simulation results are validated experimentally. A nonlinear tracking control is applied to the developed DSA platform for reduced settling time and improved disturbance rejection. Experimental results demonstrate that the applied control design reduces the settling time by up to 50% when compared to a conventional design. Moreover, it is shown that the DSA system can achieve an improvement of 80% regarding disturbance rejection when compared to a single-stage actuator.

[1]  Hyoung J. Cho,et al.  Magnetically-driven bi-directional optical microscanner , 2003 .

[2]  Seung-Woo Kim,et al.  An ultraprecision stage for alignment of wafers in advanced microlithography , 1997 .

[3]  Neville Hogan,et al.  The macro/micro manipulator : an improved architecture for robot control , 1993 .

[4]  Gary M. Bone,et al.  Design and control of a dual-stage feed drive , 2005 .

[5]  Il Hong Suh,et al.  Design of Robust High-Speed Motion Controller for a Plant With Actuator Saturation , 2000 .

[6]  Dong-Yeon Lee,et al.  Pseudo-resonant effect on a flexure-guided nano-positioning system , 2006 .

[7]  Byung-Sub Kim,et al.  Two-parameter robust repetitive control with application to a novel dual-stage actuator for noncircular Machining , 2004, IEEE/ASME Transactions on Mechatronics.

[8]  T. Hirano,et al.  Microfactories; new applications of micromachine technology to the manufacture of small products , 1997 .

[9]  Y. Yamaguchi,et al.  A dual-stage magnetic disk drive actuator using a piezoelectric device for a high track density , 1991 .

[10]  L. Guo,et al.  Dual-stage actuator servo control for high density disk drives , 1999, 1999 IEEE/ASME International Conference on Advanced Intelligent Mechatronics (Cat. No.99TH8399).

[11]  Minyue Fu,et al.  Nonlinear Feedback Control of a Dual-Stage Actuator System for Reduced Settling Time , 2008, IEEE Transactions on Control Systems Technology.

[12]  Gene F. Franklin,et al.  Feedback Control of Dynamic Systems , 1986 .