The current-voltage characteristics measured over a wide temperature range are reported for HgCdTe mid-wavelength IR n-on-p photodiodes fabricated using a novel junction formation technology. The planar homojunction device junctions were formed on LPE grown vacancy doped HgCdTe using a reactive ion etching (RIE) plasma induced conversion process. The zero bias dynamic resistance - junction area product, RoA, was 4.6 X 107 (Omega) .cm2 at 80K an is comparable to the best planar diodes reported using conventional and significantly more complicated ion implantation junction formation technology. Arrhenius plots of RoA exhibit an activation energy equal to the bandgap, Eg, and show that the diodes are diffusion limited for temperatures >= 130K. In order to further compare this junction formation technology to other techniques, a series of temperature dependent 1/f noise measurements were performed. Form this study the activation energy for 1/f noise in the region where the diodes are diffusion limited was found to be 0.7Eg. Energies close to this value have previously been associated with Hg vacancies in HgCdTe. These results are similar to those obtained from high quality HgCdTe photodiodes fabricated using mature ion implantation technology. However, the plasma based technology used in this work is significantly less complex and does not require any high temperature annealing steps.
[1]
R. Howard.
Ultralow noise high gain transimpedance amplifier for characterizing the low frequency noise of infrared detectors
,
1999
.
[2]
H. K. Chung,et al.
Origin of 1/f noise observed in Hg0.7Cd0.3Te variable area photodiode arrays
,
1985
.
[3]
S. T. Hsu.
Surface state related noise in MOS transistors
,
1970
.
[4]
Yael Nemirovsky,et al.
Tunneling and dark currents in HgCdTe photodiodes
,
1989
.
[5]
D. Polla,et al.
Effects of deep‐level defects in Hg1−xCdxTe provided by DLTS
,
1982
.
[6]
Scanning laser microscopy of reactive ion etching induced n-type conversion in vacancy-doped p-type HgCdTe
,
1997
.
[7]
A. Tóth,et al.
Type conversion of p-(HgCd)Te using and Ar reactive ion etching
,
1996
.
[8]
Yael Nemirovsky,et al.
Trapping effects in HgCdTe
,
1991
.