MEMS for Photonic Integrated Circuits

The field of microelectromechanical systems (MEMS) for photonic integrated circuits (PICs) is reviewed. This field leverages mechanics at the nanometer to micrometer scale to improve existing components and introduce novel functionalities in PICs. This review covers the MEMS actuation principles and the mechanical tuning mechanisms for integrated photonics. The state of the art of MEMS tunable components in PICs is quantitatively reviewed and critically assessed with respect to suitability for large-scale integration in existing PIC technology platforms. MEMS provide a powerful approach to overcome current limitations in PIC technologies and to enable a new design dimension with a wide range of applications.

[1]  S. Abe,et al.  Variable-Gap Silicon Photonic Waveguide Coupler Switch With a Nanolatch Mechanism , 2013, IEEE Photonics Technology Letters.

[2]  Kazuhiro Hane,et al.  A wavelength-selective add-drop switch using silicon microring resonator with a submicron-comb electrostatic actuator. , 2008, Optics express.

[3]  Mikhail D Lukin,et al.  Controlling the coherence of a diamond spin qubit through its strain environment , 2017, Nature Communications.

[4]  A microelectromechanically tunable microring resonator composed of freestanding silicon photonic waveguide couplers , 2013 .

[5]  M.J. de Boer,et al.  Mechano-optical switching in a MEMS integrated photonic crystal slab waveguide , 2011, 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems.

[6]  Michael R. Watts,et al.  AIM Process Design Kit (AIMPDKv2.0): Silicon Photonics Passive and Active Component Libraries on a 300mm Wafer , 2018, 2018 Optical Fiber Communications Conference and Exposition (OFC).

[7]  Dan Dalacu,et al.  Strain-Tunable Quantum Integrated Photonics , 2018, Nano letters.

[8]  Owers,et al.  Piezoelectrically tuned silicon nitride ring resonator , 2018 .

[9]  Tae Joon Seok,et al.  Multicast silicon photonic MEMS switches with gap-adjustable directional couplers. , 2019, Optics express.

[10]  R. Ghodssi,et al.  InP-based optical waveguide MEMS switches with evanescent coupling mechanism , 2005, Journal of Microelectromechanical Systems.

[11]  D. Uttamchandani,et al.  MEMS variable optical attenuator with vernier latching mechanism , 2006, IEEE Photonics Technology Letters.

[12]  Kazuhiro Hane,et al.  Single and multiple optical switches that use freestanding silicon nanowire waveguide couplers , 2012, Light: Science & Applications.

[13]  M.C. Wu,et al.  Silicon Microtoroidal Resonators With Integrated MEMS Tunable Coupler , 2007, IEEE Journal of Selected Topics in Quantum Electronics.

[14]  Timo Aalto,et al.  VTT's micron-scale silicon rib+strip waveguide platform , 2016, Photonics Europe.

[15]  Göran Stemme,et al.  Low-power microelectromechanically tunable silicon photonic ring resonator add-drop filter. , 2015, Optics letters.

[16]  Ming C. Wu,et al.  Die level release of silicon photonic MEMS , 2016, 2016 International Conference on Optical MEMS and Nanophotonics (OMN).

[17]  Gregory R. Steinbrecher,et al.  Quantum transport simulations in a programmable nanophotonic processor , 2015, Nature Photonics.

[18]  Ming C. Wu,et al.  Silicon photonic MEMS variable optical attenuator , 2018, OPTO.

[19]  N. Le Thomas,et al.  Low-power optical beam steering by microelectromechanical waveguide gratings. , 2018, Optics letters.

[20]  Wim Bogaerts,et al.  Silicon Photonic MEMS: Exploiting Mechanics at the Nanoscale to Enhance Photonic Integrated Circuits , 2019, 2019 Optical Fiber Communications Conference and Exhibition (OFC).

[21]  Ming C. Wu,et al.  128×128 Silicon Photonic MEMS Switch with Scalable Row/Column Addressing , 2018, 2018 Conference on Lasers and Electro-Optics (CLEO).

[22]  Michal Stepanovsky,et al.  A Comparative Review of MEMS-Based Optical Cross-Connects for All-Optical Networks From the Past to the Present Day , 2019, IEEE Communications Surveys & Tutorials.

[23]  Tetsuya Mizumoto,et al.  Integrated Magneto-Optical Materials and Isolators: A Review , 2014, IEEE Photonics Journal.

[24]  Xiaosong Tang,et al.  An in-plane nano-mechanics approach to achieve reversible resonance control of photonic crystal nanocavities. , 2010, Optics express.

[25]  Ming C. Wu,et al.  64×64 Low-loss and broadband digital silicon photonic MEMS switches , 2015, 2015 European Conference on Optical Communication (ECOC).

[26]  H. Tang,et al.  Broadband nanoelectromechanical phase shifting of light on a chip , 2013, 1312.2454.

[27]  Ming C. Wu,et al.  MEMS-Actuated 8×8 Silicon Photonic Wavelength-Selective Switches with 8 Wavelength Channels , 2018, 2018 Conference on Lasers and Electro-Optics (CLEO).

[28]  Javier Ayala,et al.  300-mm Monolithic Silicon Photonics Foundry Technology , 2019, IEEE Journal of Selected Topics in Quantum Electronics.

[29]  Chao Li,et al.  Review of Silicon Photonics Foundry Efforts , 2014, IEEE Journal of Selected Topics in Quantum Electronics.

[30]  Fook Siong Chau,et al.  Mechanically-Tunable Photonic Devices with On-Chip Integrated MEMS/NEMS Actuators , 2016, Micromachines.

[31]  A. Jourdain,et al.  Failure Mechanisms in MEMS/NEMS Devices , 2010 .

[32]  Ming C. Wu,et al.  50×50 digital silicon photonic switches with MEMS-actuated adiabatic couplers , 2015, 2015 Optical Fiber Communications Conference and Exhibition (OFC).

[33]  Ming C. Wu,et al.  Optical MEMS for Lightwave Communication , 2006, Journal of Lightwave Technology.

[34]  C. Ahn,et al.  A bidirectional magnetic microactuator using electroplated permanent magnet arrays , 2002 .

[35]  D. Marom,et al.  Fast switching via frustrated total internal reflection in silicon photonics MEMS-actuated waveguides , 2019, 2019 International Conference on Optical MEMS and Nanophotonics (OMN).

[36]  Jie Deng,et al.  Dynamic tuning of an optical resonator through MEMS-driven coupled photonic crystal nanocavities. , 2010, Optics letters.

[37]  Kristinn B. Gylfason,et al.  Dynamic dispersion tuning of silicon photonic waveguides by microelectromechanical actuation , 2017, 2017 Conference on Lasers and Electro-Optics (CLEO).

[38]  ierre,et al.  Tuning the strain-induced resonance shift in silicon racetrack resonators by their orientation , 2018 .

[39]  David A. B. Miller,et al.  Perfect optics with imperfect components , 2015 .

[40]  Gijsbertus J.M. Krijnen,et al.  Micromechanically tuned ring resonator in silicon on insulator , 2011 .

[41]  Franck Chollet,et al.  Moving Polymer Waveguides and Latching Actuator for 2 × 2 MEMS Optical Switch , 2009 .

[42]  A. Fiore,et al.  Electrically driven quantum light emission in electromechanically tuneable photonic crystal cavities , 2017, 1706.05610.

[43]  Michael R. Watts,et al.  Large-scale nanophotonic phased array , 2013, Nature.

[44]  A. Fiore,et al.  Low-Voltage InP MEMS Optical Switch on Silicon , 2019 .

[45]  Mingbo He,et al.  MEMS-Based Tunable Grating Coupler , 2019, IEEE Photonics Technology Letters.

[46]  Ai-Qun Liu.  Photonic MEMS Devices: Design, Fabrication and Control , 2008 .

[47]  C. Doerr,et al.  Silicon photonic integration in telecommunications , 2015, Front. Phys..

[48]  Laura Mančinska,et al.  Multidimensional quantum entanglement with large-scale integrated optics , 2018, Science.

[49]  D. Van Thourhout,et al.  Ultracompact Phase Modulator Based on a Cascade of NEMS-Operated Slot Waveguides Fabricated in Silicon-on-Insulator , 2012, IEEE Photonics Journal.

[50]  Kristinn B. Gylfason,et al.  A MEMS tunable photonic ring resonator with small footprint and large free spectral range , 2015, 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS).

[51]  Z. Yang,et al.  A reconfigurable coupled optical resonators in photonic circuits for photon shutting , 2017, 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS).

[52]  Rohit Chatterjee,et al.  Nanomechanical Proximity Perturbation for Switching in Silicon-Based Directional Couplers for High-Density Photonic Integrated Circuits , 2010, Journal of Microelectromechanical Systems.

[53]  C. Sullivan,et al.  1 /spl times/ 2 MOEMS switch based on silicon-on-insulator and polymeric waveguides , 2002 .

[54]  Ana M. Sánchez,et al.  Silicon Nitride Photonic Integration Platforms for Visible, Near-Infrared and Mid-Infrared Applications , 2017, Sensors.

[55]  S. J. Bleiker,et al.  Wafer-Level Vacuum Sealing by Transfer Bonding of Silicon Caps for Small Footprint and Ultra-Thin MEMS Packages , 2019, Journal of Microelectromechanical Systems.

[56]  Kerry Vahala,et al.  Cavity opto-mechanics. , 2007, Optics express.

[57]  Ming C. Wu,et al.  Highly Scalable Digital Silicon Photonic MEMS Switches , 2016, Journal of Lightwave Technology.

[58]  Ke Li,et al.  Multipurpose silicon photonics signal processor core , 2017, Nature Communications.

[59]  Niels Quack,et al.  Bistable silicon photonic MEMS switches , 2019, OPTO.

[60]  P. Rakich,et al.  A silicon Brillouin laser , 2017, Science.

[61]  Tian Jian Lu,et al.  Institute of Physics Publishing Journal of Micromechanics and Microengineering Mems Actuators and Sensors: Observations on Their Performance and Selection for Purpose , 2022 .

[62]  D. Yoo,et al.  Tunable Grating Couplers for Broadband Operation Using Thermo-Optic Effect in Silicon , 2015, IEEE Photonics Technology Letters.

[63]  A. Fiore,et al.  Nanomechanical control of optical field and quality factor in photonic crystal structures , 2018 .

[64]  Ming C. Wu,et al.  Large-Scale Polarization-Insensitive Silicon Photonic MEMS Switches , 2018, Journal of Lightwave Technology.

[65]  William S Rabinovich,et al.  Loss reduction in electromechanically tunable microring cavities. , 2019, Optics letters.

[66]  R. Soref,et al.  Electrooptical effects in silicon , 1987 .

[67]  Ming C. Wu,et al.  Wafer-scale silicon photonic switches beyond die size limit , 2019, Optica.

[68]  Kristinn B. Gylfason,et al.  A low-power MEMS tunable photonic ring resonator for reconfigurable optical networks , 2015, 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS).

[69]  T. Kippenberg,et al.  PORT: A piezoelectric optical resonance tuner , 2019, 2018 IEEE Micro Electro Mechanical Systems (MEMS).

[70]  S. Abe,et al.  A silicon microring resonator with a nanolatch mechanism , 2015 .

[71]  J. Bowers,et al.  Phase tuning by length contraction. , 2018, Optics express.

[72]  M. Takenaka,et al.  Tunable Grating Coupler by Thermal Actuation and Thermo-Optic Effect , 2018, IEEE Photonics Technology Letters.

[73]  Qi Li,et al.  Silicon Photonics for Exascale Systems , 2014, Journal of Lightwave Technology.

[74]  Kazuhiro Hane,et al.  A tunable notch filter using microelectromechanical microring with gap-variable busline coupler. , 2013, Optics express.

[75]  Kazuhiro Hane,et al.  Ultra-small silicon waveguide coupler switch using gap-variable mechanism. , 2011, Optics express.

[76]  Peter De Heyn,et al.  50Gb/s silicon photonics platform for short-reach optical interconnects , 2016, 2016 Optical Fiber Communications Conference and Exhibition (OFC).

[77]  Mitsuru Takenaka,et al.  Strain-induced enhancement of plasma dispersion effect and free-carrier absorption in SiGe optical modulators , 2013, Scientific Reports.

[79]  Lech Wosinski,et al.  MEMS tunable hybrid plasmonic-Si waveguide , 2017, 2017 Optical Fiber Communications Conference and Exhibition (OFC).

[80]  Ming C. Wu,et al.  Large-scale broadband digital silicon photonic switches with vertical adiabatic couplers , 2016 .

[81]  K. Hane,et al.  Silicon photonic microelectromechanical switch using lateral adiabatic waveguide couplers. , 2018, Optics express.

[83]  Sasan Fathpour,et al.  Electrical control of parametric processes in silicon waveguides. , 2008, Optics express.

[84]  Z. K. Bishop,et al.  Electro-mechanical control of an on-chip optical beam splitter containing an embedded quantum emitter. , 2017, Optics letters.

[85]  Roel Baets,et al.  NEMS-based optical phase modulator fabricated on Silicon-On-Insulator , 2011, 8th IEEE International Conference on Group IV Photonics.

[86]  Wim Bogaerts,et al.  Demonstration of a 4 × 4-port universal linear circuit , 2016 .

[87]  Damien Bonneau,et al.  Silicon Quantum Photonics , 2015, IEEE Journal of Selected Topics in Quantum Electronics.

[88]  Ming C. Wu,et al.  Tunable coupling regimes of silicon microdisk resonators using MEMS actuators. , 2006, Optics express.

[89]  R. Gutmann,et al.  Adhesive wafer bonding , 2006 .

[90]  K. Vahala,et al.  Cavity opto-mechanics , 2008, 2008 Conference on Lasers and Electro-Optics and 2008 Conference on Quantum Electronics and Laser Science.

[91]  H. M. Chu,et al.  A Wide-Tuning Silicon Ring-Resonator Composed of Coupled Freestanding Waveguides , 2014, IEEE Photonics Technology Letters.

[92]  E. Linfield,et al.  Quantum photonic integrated circuits based on tunable dots and tunable cavities , 2018, APL Photonics.

[93]  Kazuhiro Hane,et al.  Phase-shifter using submicron silicon waveguide couplers with ultra-small electro-mechanical actuator. , 2010, Optics express.

[94]  T. Kippenberg,et al.  An unreleased MEMS actuated silicon nitride resonator with bidirectional tuning , 2018, 2018 Conference on Lasers and Electro-Optics (CLEO).

[95]  Matthew J. Byrd,et al.  Long-Range LiDAR and Free-Space Data Communication With High-Performance Optical Phased Arrays , 2019, IEEE Journal of Selected Topics in Quantum Electronics.

[96]  Di Liang,et al.  Photonic integration: Si or InP substrates? , 2009 .

[97]  Andreas D. Wieck,et al.  Nanomechanical single-photon routing , 2018, Optica.

[98]  羽根 一博,et al.  Submicron silicon waveguide optical switch driven by microelectromechanical actuator , 2008 .

[99]  Franck Chollet,et al.  Devices Based on Co-Integrated MEMS Actuators and Optical Waveguide: A Review , 2016, Micromachines.

[100]  Marko Loncar,et al.  Strain engineering of the silicon-vacancy center in diamond , 2018, Physical Review B.

[101]  Mingbo He,et al.  Power-Efficient Thermal Optical Tunable Grating Coupler Based on Silicon Photonic Platform , 2019, IEEE Photonics Technology Letters.

[102]  R. Ridder,et al.  Tuning a racetrack ring resonator by an integrated dielectric MEMS cantilever. , 2011, Optics express.

[103]  R. Baets,et al.  Silicon-on-insulator microring resonator for biosensing , 2007 .

[104]  H. Toshiyoshi,et al.  MEMS-actuated photonic crystal switches , 2006, IEEE Photonics Technology Letters.

[105]  Rajeev J Ram,et al.  Efficient Thermal Tuning for Second-order Silicon Nitride Microring Resonators , 2007, 2007 Photonics in Switching.

[106]  Huihui Lu,et al.  Photonic Packaging: Transforming Silicon Photonic Integrated Circuits into Photonic Devices , 2016 .

[107]  Umar Khan,et al.  Controlling parasitics in linear optical processors , 2018 .

[108]  Ming C. Wu,et al.  Monolithic 50×50 MEMS silicon photonic switches with microsecond response time , 2014, OFC 2014.

[109]  William S Rabinovich,et al.  Broadband opto-electro-mechanical effective refractive index tuning on a chip. , 2016, Optics express.

[110]  Chang Liu,et al.  Micro magnetic silicone elastomer membrane actuator , 2001 .

[111]  Andrea Fiore,et al.  Nano-opto-electro-mechanical systems , 2018, Nature Nanotechnology.

[112]  G. Barbastathis,et al.  Integrated wavelength-selective optical MEMS switching using ring resonator filters , 2005, IEEE Photonics Technology Letters.

[113]  M. Wu,et al.  MEMS-actuated microdisk resonators with variable power coupling ratios , 2005, IEEE Photonics Technology Letters.

[114]  H. Li.  Refractive index of silicon and germanium and its wavelength and temperature derivatives , 1980 .

[115]  Ming C. Wu,et al.  Large-scale silicon photonic switches with movable directional couplers , 2015 .

[116]  M. Markham,et al.  Spectral Alignment of Single-Photon Emitters in Diamond using Strain Gradient , 2018, Physical Review Applied.

[117]  Kristinn B. Gylfason,et al.  MEMS tunable silicon photonic grating coupler for post-assembly optimization of fiber-to-chip coupling , 2017, 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS).

[118]  Ming C. Wu,et al.  Scalable Row/Column Addressing of Silicon Photonic MEMS Switches , 2016, IEEE Photonics Technology Letters.