论文信息 - Influence of the surface treatment of the substrate in the LCVD of CNx films - 字舞流文

Influence of the surface treatment of the substrate in the LCVD of CNx films

A. Crunteanu | V. Nelea | I. Mihailescu | R. Alexandrescu | I. Morjan | A. Andrei | F. Vasiliu | R. Cireasa