Microfluidic Devices on Printed Circuit Board

This chapter discusses a new approach for fabrication of microfluidic devices based on printed circuit board (PCB) technology. The chapter shortly describes the basic process steps in PCB fabrication considering the special needs of fluidic components to make it easier to understand the technological approach. Design, fabrication and characteristics of a number of sensors and actuators are presented. Results of active component such as diffuser/nozzle pumps, peristaltic pumps, check-valve pumps and sensors such as pressure sensors, flow sensors, bubble sensors, and pH sensors prove the feasibility of this new fabrication concept.

[1]  権藤 靖夫.  C.A.Neugebauer, J.B. Newkirk and D.A. Vermilyea(ed): Structure and Properties of Thin Films, John Wiley & Sons, Inc., New York 1959, 561頁, 21×28cm, 5,700円 , 1960 .

[2]  Tobias Merkel,et al.  Electric fields in fluidic channels and sensor applications with capacitance , 2000 .

[3]  Nam-Trung Nguyen,et al.  Integrated flow sensor for in situ measurement and control of acoustic streaming in flexural plate wave micropumps , 2000 .

[4]  Jens Anders Branebjerg,et al.  Microfluidics-a review , 1993 .

[5]  W. Ehrfeld,et al.  A self-filling low-cost membrane micropump , 1998, Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176.

[6]  Walter Lang,et al.  Reflexions on the future of microsystems , 1999 .

[7]  M. Elwenspoek,et al.  Modular concept for fluid handling systems. A demonstrator micro analysis system , 1996, Proceedings of Ninth International Workshop on Micro Electromechanical Systems.

[8]  Jan H. J. Fluitman,et al.  Towards integrated microliquid handling systems , 1994 .

[9]  Wen H. Ko,et al.  Modeling of circular diaphragm and spreadsheet solution programming for touch mode capacitive sensors , 1999 .

[10]  J. G. Smits.  Piezoelectric micropump with three valves working peristaltically , 1990 .

[11]  Nam-Trung Nguyen,et al.  Micromachined flow sensors—a review , 1997, Flow Measurement and Instrumentation.

[12]  P. Woias,et al.  A self-priming and bubble-tolerant piezoelectric silicon micropump for liquids and gases , 1998, Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176.

[13]  Richard M. White,et al.  Design and optimization of an ultrasonic flexural plate wave micropump using numerical simulation , 1999 .

[14]  Wolfram Doetzel,et al.  Hybrid microdosing system , 1998, Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components.

[15]  C. Neugebauer,et al.  Structure and Properties of Thin Films , 1962 .

[16]  Lars Rosengren,et al.  Micromachined sensor structures with linear capacitive response , 1992 .

[17]  Tobias Merkel,et al.  A new technology for fluidic microsystems based on PCB technology , 1999 .

[18]  R. Mountain,et al.  A technique for the determination of stress in thin films , 1983 .

[19]  K. R. Williams,et al.  Novel interconnection technologies for integrated microfluidic systems , 1998 .

[20]  Jaesung Jang,et al.  Theoretical and experimental study of MHD (magnetohydrodynamic) micropump , 2000 .

[21]  Minhang Bao,et al.  Study on linearization of silicon capacitive pressure sensors , 1997 .

[22]  G. Stemme.  Micro fluid sensors and actuators , 1995, MHS'95. Proceedings of the Sixth International Symposium on Micro Machine and Human Science.