Development of the three dimensional multi-electrode array for neural recording

A novel method has been developed for the manufacture of a three dimensional multi-electrode array (3D MEA), particularly, the shape of micro-tips can be varied by MEMS technology to construct different multi-electrode array. It improved the disadvantage of single electrode, which meant that it was available for multi recording and analysis of a series of signals. Overcome the difficulty of making interconnection line on 3D MEA chips via innovative fabrication process design. Use local isolation and removal of oxide films to forming electrodes and interconnections with oxide isolation covers. A 10/spl times/10 3D MEA with a distance of 100 /spl mu/m between each other for further bio-neural signals was demonstrated, and a test on rabbit retina was also available. Besides, integrating pre-amplifier and built-in resistors with 3D MEA was brought out to hopefully increase the efficiency of sensing.

[1]  S. DeVries.  Correlated firing in rabbit retinal ganglion cells. , 1999, Journal of neurophysiology.

[2]  Richard H. Masland,et al.  Starburst Cells Nondirectionally Facilitate the Responses of Direction-Selective Retinal Ganglion Cells , 2002, The Journal of Neuroscience.

[3]  D. Baylor,et al.  Receptive-field microstructure of blue-yellow ganglion cells in primate retina , 1999, Nature Neuroscience.

[4]  J. Judy,et al.  Micromachined electrodes for retinal prostheses , 2002, 2nd Annual International IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine and Biology. Proceedings (Cat. No.02EX578).

[5]  Peter Enoksson,et al.  Micromachined electrodes for biopotential measurements , 2001 .

[6]  K. Horch,et al.  A silicon-based, three-dimensional neural interface: manufacturing processes for an intracortical electrode array , 1991, IEEE Transactions on Biomedical Engineering.