论文信息 - Investigation of n‐ and p‐type doping of GaN during epitaxial growth in a mass production scale multiwafer‐rotating‐disk reactor - 字舞流文

Investigation of n‐ and p‐type doping of GaN during epitaxial growth in a mass production scale multiwafer‐rotating‐disk reactor

S. Pearton | Yicheng Lu | R. Kolbas | A. Thompson | M. Schurman | A. Gurary | R. Stall | T. Salagaj | C. Yuan | W. Kroll | C. Hwang | W. Mayo | S. Krishnankutty | Y. Li | I. Shmagin