论文信息 - 50 keV electron multibeam mask writer for the 11nm HP node: first results of the proof of concept tool (eMET POC)

50 keV electron multibeam mask writer for the 11nm HP node: first results of the proof of concept tool (eMET POC)

First results obtained with IMS Nanofabrication's 50keV proof-of-concept electron multi-beam mask exposure tool (eMET POC) are presented. The eMET POC was designed from scratch to meet the requirements of the 11nm half-pitch node and features already the same column as future high volume manufacturing (HVM) tools. All exposures shown in this paper were the result of 262,144 beams of 20nm beam size working in parallel demonstrating the capability of IMS' multi-beam technology. An Alpha Tool is scheduled for 2014, followed by a Beta Tool in 2015 and 1st generation HVM Tools in 2016.

Elmar Platzgummer | Hans Loeschner | Christof Klein

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