论文信息 - Diamond-like carbon films deposited using a broad, uniform ion beam from an RF inductively coupled CH4-plasma source - 字舞流文

Diamond-like carbon films deposited using a broad, uniform ion beam from an RF inductively coupled CH4-plasma source

A. Khomich | B. Druz | A. Rukovishnikov | N. M. Rossukanyi | V. Polyakov | E. Ostan | A. Hayes | S. Distefano | V. Kanarov