Deflection performance of a bi-directional distributed polymeric piezoelectric micromotor
暂无分享,去创建一个
[1] M. Marcus. Performance characteristics of piezoelectric polymer flexure mode devices , 1984 .
[2] Hiroyuki Fujita,et al. Fabrication and operation of polyimide bimorph actuators for a ciliary motion system , 1993 .
[3] Terunobu Akiyama,et al. Controlled stepwise motion in polysilicon microstructures , 1993 .
[4] M. Kurosawa,et al. Ultrasonic motors , 1988, IEEE 1988 Ultrasonics Symposium Proceedings..
[5] Hiroyuki Fujita,et al. A conveyance system using air flow based on the concept of distributed micro motion systems , 1994 .
[6] Masayoshi Esashi,et al. Fabrication of distributed electrostatic micro actuator (DEMA) , 1993 .
[7] J. Lang,et al. Electric micromotor dynamics , 1992 .
[8] K. J. Gabriel,et al. Design, fabrication, and operation of submicron gap comb-drive microactuators , 1992 .
[9] R. Muller,et al. IC-processed electrostatic micromotors , 1989 .
[10] D. Polla,et al. Compact, high-displacement piezoelectric actuator with potential micromechanical applications , 1990, IEEE Symposium on Ultrasonics.
[11] Dennis L. Polla,et al. Design of linear-motion microactuators using piezoelectric thin films , 1991 .
[12] S. Goodwin-Johansson,et al. Integrated force arrays , 1993, [1993] Proceedings IEEE Micro Electro Mechanical Systems.
[13] William C. Tang,et al. Laterally Driven Polysilicon Resonant Microstructures , 1989 .
[14] D. Polla,et al. A linear piezoelectric stepper motor with submicrometer step size and centimeter travel range , 1990, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.
[15] Yu-Chong Tai,et al. IC-processed electrostatic synchronous micromotors , 1989 .
[16] Aditi Chattopadhyay,et al. Design of a smart flap using C-block actuators and a hybrid optimization technique , 1996, Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring.
[17] Zhixiao Wang,et al. Design and characterization of a linear motion piezoelectric microactuator , 1989, Proceedings, 1989 International Conference on Robotics and Automation.
[18] William C. Tang,et al. Electrostatic Comb Drive Levitation And Control Method , 1992 .
[19] L. E. Cross,et al. Piezoelectric micromotors for microrobots , 1992 .
[20] N. C. MacDonald,et al. An isolation technology for joined tungsten MEMS , 1993, [1993] Proceedings IEEE Micro Electro Mechanical Systems.