A novel vacuum-packaged low-power scanning mirror with inclined 3D-shaped window
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W. Benecke | B. Wagner | H. Quenzer | U. Hofmann | F. Senger | F. Soerensen | B. Jensen | J. Janes | T. Giese | C. Eisermann | C. Schroeder | J. Hagge | D. Vick | O. Schwarzelbach | L. Ratzmann