A New Isolation Technique for Reverse Blocking IGBT with Ion Implantation and Laser Annealing to Tapered Chip Edge Sidewalls
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Haruo Nakazawa | Kazuo Shimoyama | Manabu Takei | Y. Souma | A. Yajima | S. Kajiwara | H. Nakazawa | K. Shimoyama | M. Takei | Y. Souma | A. Yajima | S. Kajiwara
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