Stroboscopic interferometer system for dynamic MEMS characterization
暂无分享,去创建一个
[1] J. Goodman. Introduction to Fourier optics , 1969 .
[2] J S Harris,et al. Stroboscopic interferometer. , 1979, Applied optics.
[3] L. Drain. The Laser Doppler Technique , 1980 .
[4] D. J. Ewins,et al. Modal Testing: Theory and Practice , 1984 .
[5] J C Wyant,et al. Two-wavelength phase shifting interferometry. , 1984, Applied optics.
[6] J. Wyant,et al. Multiple-wavelength phase-shifting interferometry. , 1985, Applied optics.
[7] T. Eiju,et al. Digital phase-shifting interferometry: a simple error-compensating phase calculation algorithm. , 1987, Applied optics.
[8] William C. Tang,et al. Electrostatic-comb drive of lateral polysilicon resonators , 1990 .
[9] D. M. Freeman,et al. Statistics of subpixel registration algorithms based on spatiotemporal gradients or block matching , 1998 .
[10] Kam Y. Lau,et al. Electrostatic combdrive-actuated micromirrors for laser-beam scanning and positioning , 1998 .
[11] D. M. Freeman,et al. Using a light microscope to measure motions with nanometer accuracy , 1998 .
[12] N. C. MacDonald,et al. Five parametric resonances in a microelectromechanical system , 1998, Nature.
[13] R. C. Gutierrez,et al. Pulsed-Source Interferometry for Characterization of Resonant Micromachined Structures , 1998 .
[14] R. Muller,et al. TIME-RESOLVED MEASUREMENT of OPTICAL MEMS USING STROBOSCOPIC INTERFEROMETRY , 1999 .
[15] D. M. Freeman,et al. Nanometer resolution of three-dimensional motions using video interference microscopy , 1999, Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291).
[16] O. Solgaard,et al. Optical raster-scanning displays based on surface-micromachined polysilicon mirrors , 1999 .
[17] Kam Y. Lau,et al. A raster-scanning full-motion video display using polysilicon micromachined mirrors , 2000 .