论文信息 - Atomic layer epitaxy of AlAs and (AlAs)n(GaAs)n superlattices with a new aluminum source ethyldimethylamine alane - 字舞流文

Atomic layer epitaxy of AlAs and (AlAs)n(GaAs)n superlattices with a new aluminum source ethyldimethylamine alane

H. Munekata | H. Kukimoto | N. Kano | S. Hirose | K. Hara

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