A conceptual design environment for micromechanisms
暂无分享,去创建一个
[1] Aylmer Johnson,et al. A design environment for the design of micromachines , 1995 .
[2] S. B. Crary,et al. Integration of the anisotropic-silicon-etching program ASEP within the CAEMEMS CAD/CAE framework , 1992, [1992] Proceedings IEEE Micro Electro Mechanical Systems.
[3] S. D. Senturia. CAD For Microelectromechanical Systems , 1995, Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95.
[4] Takashi Kiriyama,et al. An Integrated Modelling Environment Using the Metamodel , 1994 .
[5] G. K. Ananthasuresh,et al. Design and Fabrication of Microelectromechanical Systems , 1994 .
[6] Carlos H. Mastrangelo,et al. Mistic 1.1: A Process Compiler for Micromachined Devices , 1995, Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95.
[7] Y. Zhang,et al. Software tools for designers of sensor and actuator CAE systems , 1991, TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers.
[8] Nicolaas F. de Rooij,et al. ASEP : a CAD Program for Silicon Anisotropic Etching , 1991 .
[9] T. J. Hubbard,et al. Emergent faces in crystal etching , 1994 .
[10] Shinobu Yoshimura,et al. A CAE system for micromachines: its application to electrostatic micro wobble actuator , 1995 .
[11] Narito Shibaike,et al. Micromachining and focused ion beam etching of Si for accelerometers , 1995, Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components.
[12] Jacob K. White,et al. Implementation of MEMCAD system for electrostatic and mechanical analysis of complex structures from mask descriptions , 1993, [1993] Proceedings IEEE Micro Electro Mechanical Systems.