Photothermal operation of high frequency nanoelectromechanical systems

We describe photothermal operation of nanoelectromechanical systems (NEMS) in ambient atmosphere. Using a tightly focused modulated laser source, we have actuated the out-of-plane flexural resonances of bilayered doubly clamped beams. The optically detected displacement profiles in these beams are consistent with a model where the absorbed laser power results in a local temperature rise and a subsequent thermally induced bending moment. The described technique allows probing and actuation of NEMS with exquisite spatial and temporal resolution. From a device perspective, the technique offers immense frequency tunability and may enable future NEMS that can be remotely accessed without electronic coupling.

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