Robust Active Vibration Isolation: A Multivariable Data-Driven Approach

Abstract Active vibration isolation is essential for a large range of high precision motion systems in industry. This paper aims to develop a framework for high performance robust vibration isolation by explicitly addressing multivariable flexible dynamical behavior. A framework is proposed that connects identification and control. In addition, a new data-driven uncertainty modeling procedure is used that results in a nonconservative model error bound. Application on an active vibration isolation system confirms high performance robust vibration isolation.

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