Enhancement of Electrochemical Properties of Si Alloy Anodes by Ultrathin Al2O3 Atomic Layer Deposition for Li-Ion Batteries

1. MK Electron Co. Yongin-si, Gyeonggi-do, 449-812, Korea 2. Department of Mechanical Engineering, University of Colorado at Boulder, Boulder, CO, 80309-0427, USA 3. Department of Chemistry and Biochemistry, University of Colorado at Boulder, Boulder, CO, 80309-0215, USA 4. School of Material Science & Engineering, Seoul National University, Seoul, Korea 5. Samsung SDI, Yongin-si, Gyeonggi-do, Korea Email : jscho@mke.co.kr