论文信息 - Role of W and Mn for reliable 1X nanometer-node ultra-large-scale integration Cu interconnects proved by atom probe tomography - 字舞流文

Role of W and Mn for reliable 1X nanometer-node ultra-large-scale integration Cu interconnects proved by atom probe tomography

Y. Shimogaki | Y. Shimizu | Koji Inoue | Y. Nagai | T. Momose | K. Shima | H. Takamizawa | H. Shimizu | Y. Tu | K. Inoue