Performance of High-$Q$ Inductors in LTCC Using FTTF Techniques

Inductors have been produced in low-temperature co-fired ceramic in a manner that increases the cross-sectional area of the conductor. This geometry helps to compensate for high-frequency non-idealities, such as skin effect, current crowding and proximity effect. An array of various inductor geometries and probing structures has been fabricated and characterized. <formula formulatype="inline"><tex Notation="TeX">$Q{\rm s}$</tex></formula> of over 80 were confirmed, with <formula formulatype="inline"><tex Notation="TeX">$Q{\rm s}$</tex></formula> of over 100 believed to be possible. Accurate measurements of such values require careful consideration of error sources and the use of rigorous measurement techniques that are discussed. Finally, a filter has been fabricated to demonstrate the usefulness of these inductors in real-world applications.

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