Integrated Microsystems in the macro-world

Since the 1960s etching of silicon has been used to make three-dimensional structures. The first devices were pressure sensors using a thin silicon membrane. More recently accelerometers and gyroscopes have been developed. All of these devices can be integrated with electronics enabling the introduction of extra functions such as self-test and self-calibration. A broader look at sensors shows a wealth of integrated devices. The critical issues are reliability and packaging if these devices are to find the applications. A number of silicon sensors have shown great commercial success. What are the directions for the new generations of Microsystems? This paper will examine the opportunities for integrated Microsystems as well as scaling and increased autonomy.

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