论文信息 - Back-End-of-Line Compatible HfO2/ZrO2 Superlattice Ferroelectric Capacitor With High Endurance and Remnant Polarization - 字舞流文

Back-End-of-Line Compatible HfO2/ZrO2 Superlattice Ferroelectric Capacitor With High Endurance and Remnant Polarization

P. Ren | Runsheng Wang | Hongliang Lu | Yishan Wu | Maokun Wu | Boyao Cui | Ru Huang | D. Zhang | Yu-Chun Li | Zhigang Ji | Xuepei Wang | Xiaoxi Li | Jinhao Liu | Sheng Ye