Misalignment aberrations calibration in testing of high-numerical-aperture spherical surfaces.
暂无分享,去创建一个
Chen Chen | Yongmo Zhuo | Yongying Yang | Daodang Wang | C. Chen | Yongying Yang | Yongmo Zhuo | Daodang Wang | Cheng Chen
[1] Hans J. Tiziani. Optical methods for precision measurements , 1989 .
[2] D T Moore,et al. Measurement and calibration of interferometric imaging aberrations. , 2000, Applied optics.
[3] Curtis Volin,et al. Misalignment modes in high-performance optical systems , 2000 .
[4] J. Schwider,et al. Absolute sphericity measurement: a comparative study of the use of interferometry and a Shack-Hartmann sensor. , 1998, Optics letters.
[5] Katherine Creath,et al. Error sources in phase-measuring interferometry , 2010 .
[6] N. I. Chkhalo,et al. Manufacturing and investigation of objective lens for ultrahigh resolution lithography facilities , 2008, International Conference on Micro- and Nano-Electronics.
[7] L. Deck. Suppressing phase errors from vibration in phase-shifting interferometry. , 2009, Applied optics.
[8] B Dorband,et al. Testing aspheric surfaces with computer-generated holograms: analysis of adjustment and shape errors. , 1985, Applied optics.
[9] C Huang,et al. Propagation errors in precision Fizeau interferometry. , 1993, Applied optics.
[10] H. Tiziani. Optical methods for precision measurements , 1989 .
[11] J. Y. Wang,et al. Wave-front interpretation with Zernike polynomials. , 1980, Applied optics.
[12] J. Wyant,et al. Basic Wavefront Aberration Theory for Optical Metrology , 1992 .
[13] K Creath,et al. Phase-shifting errors in interferometric tests with high-numerical-aperture reference surfaces. , 1994, Applied optics.
[14] Katherine Creath,et al. Error sources in phase-measuring interferometry (Invited Paper) , 1992, Other Conferences.
[15] Absolute sphericity measurement. , 1989, Applied optics.
[16] C M King,et al. Computer program for the analysis of interferometric test data. , 1972, Applied optics.
[17] James H. Burge,et al. Limits for interferometer calibration using the random ball test , 2009, Optical Engineering + Applications.
[18] Xiao-Ping Ling,et al. Accuracy Of Fringe Pattern Analysis , 1989, Optics & Photonics.
[19] R. Burow,et al. Absolute interferometric surface testing: a stringent need , 1993, Optical Systems Design.
[20] P. Groot. Vibration in phase-shifting interferometry , 1995 .
[21] Anton Barty,et al. 100-picometer interferometry for EUVL , 2002, SPIE Advanced Lithography.
[22] J E Greivenkamp,et al. Interferometer errors due to the presence of fringes. , 1996, Applied optics.
[23] Sen Han,et al. Design of an interferometer for the measurement of long radius optics , 2000, Electronic Imaging.
[24] Christof Pruss,et al. Absolute interferometric test of aspheres by use of twin computer-generated holograms. , 2003, Applied optics.
[25] Kazuya Ota,et al. Development of the point diffraction interferometer for extreme ultraviolet lithography: Design, fabrication, and evaluation , 2002 .