A low voltage actuated micromachined microwave switch using torsion springs and leverage
暂无分享,去创建一个
A new push-pull configuration using torsion springs and leverage for low-voltage actuated microwave switch is proposed. It is fabricated by surface micromachining and has demonstrated switch operation up to 4 GHz. The actuation voltage is 6 V and an isolation has been achieved of more than 28 dB by the push-pull configuration.
[1] Lawrence E. Larson,et al. Micromachined microwave actuator (MIMAC) technology-a new tuning approach for microwave integrated circuits , 1991, IEEE 1991 Microwave and Millimeter-Wave Monolithic Circuits Symposium. Digest of Papers.