Study on mechanism of crystallization in HfO2 films on Si substrates by in-depth profile analysis using photoemission spectroscopy
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Yun Sun | Shiyu Sun | D. Lee | P. Pianetta | I. Oshiyama | H. Kumigashira | M. Oshima | H. Takahashi | Zhi Liu | S. Toyoda | S. Fukuda | K. Tai