Measurement of the mirror reflective spectrum of typical roughness surface in the ultraviolet band

Reflective light of a surface contains many features of a surface. It is usually used as a powerful tool for process in situ or ex suit monitoring because of its non contact and non destructive nature. Scatter measurements of some typical samples in the UV band are performed by using an ellipsometry WVASE 32 made by J. A. Woolam Co. Inc. The mirror-direction reflective measurement results of different sample obtained by ellipsometer are compared. And these kinds of researches about measuring and analyzing of typical roughness samples in the ultraviolet band have significant meanings in a lot of related fields.

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