Metrology with scanning probe microscopes

One of the more demanding requirements of sub -micron lithography is dimensional measurement of the patterned features. Probe microscopes can perform this task nondestructively on most solids in a wide range of ambient conditions, though not without careful attention to several sources of measurement error. The most serious problem arises from the finite size of the probe, which has an intrinsically nonlinear interaction with the surface to be measured.

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